Equipment
Equipment for sample fabrication
Ultrahigh vacuum sputtering system #1
Ultrahigh vacuum sputtering system #2
Reactive ion etching system
Ion beam etching system
Sputtering system
Atomic layer deposition system
Electron-beam lithography system (Shared)
Contact aligner(Shared)
Photo-mask writer (Shared)
Asher (Shared)
Local exhaust ventilation (Shared)
Scanning electron microscope (Shared)
High magnetic field annealing system
Stylus profiler
Wafer scriber
Wire bonding instrument (Shared)
Equipment for sample characterization
Vibrating sample magnetometer
X-ray diffraction machine (Shared)
Physical properties measurement system
Atomic-force/Magnetic-force microscope
Kerr-effect microscope
Kerr loop measurement system
Fully-automatic prober with perpendicular/in-plane magnetic field
Fully-automatic prober with arbitrary-direction magnetic field
Semi-automatic prober with perpendicular/in-plane magnetic field
Manual prober with perpendicular/in-plane magnetic field
Manual prober with perpendicular magnetic field
Manual prober with arbitrary-direction magnetic field
High-frequency prober with optical access
Refrigerator with rotating magnet
Current-in-plane tunneling system
Sheet-resistance measurement instrument