Equipment
Equipment for sample fabrication
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image1.jpeg)
Ultrahigh vacuum sputtering system #1
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image2.jpeg)
Ultrahigh vacuum sputtering system #2
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image3.jpeg)
Reactive ion etching system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image4.jpeg)
Ion beam etching system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image5.jpeg)
Sputtering system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image6.jpeg)
Atomic layer deposition system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image7.jpeg)
Electron-beam lithography system (Shared)
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image8.jpeg)
Contact aligner(Shared)
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image9.jpeg)
Photo-mask writer (Shared)
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image10.jpeg)
Asher (Shared)
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image11.jpeg)
Local exhaust ventilation (Shared)
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image12.jpeg)
Scanning electron microscope (Shared)
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image13.jpeg)
High magnetic field annealing system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image14.jpeg)
Stylus profiler
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image15.jpeg)
Wafer scriber
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image16.jpeg)
Wire bonding instrument (Shared)
Equipment for sample characterization
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image17.jpeg)
Vibrating sample magnetometer
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image18.jpeg)
X-ray diffraction machine (Shared)
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image19.jpeg)
Physical properties measurement system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image20.jpeg)
Atomic-force/Magnetic-force microscope
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image21.jpeg)
Kerr-effect microscope
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image22.jpeg)
Kerr loop measurement system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image23.jpeg)
Fully-automatic prober with perpendicular/in-plane magnetic field
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image24.jpeg)
Fully-automatic prober with arbitrary-direction magnetic field
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image25.jpeg)
Semi-automatic prober with perpendicular/in-plane magnetic field
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image26.jpeg)
Manual prober with perpendicular/in-plane magnetic field
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image27.jpeg)
Manual prober with perpendicular magnetic field
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image28.jpeg)
Manual prober with arbitrary-direction magnetic field
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image29.jpeg)
High-frequency prober with optical access
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image30.jpeg)
Refrigerator with rotating magnet
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image31.jpeg)
Current-in-plane tunneling system
![](http://www.spin.riec.tohoku.ac.jp/content/images/equipment2/image32.jpeg)
Sheet-resistance measurement instrument