Fukami Laboratory, Research Institute of Electrical Communication, Tohoku University

Equipment

Equipment for sample fabrication

Ultrahigh vacuum sputtering system #1

Ultrahigh vacuum sputtering system #2

Reactive ion etching system

Ion beam etching system

Sputtering system

Atomic layer deposition system

Electron-beam lithography system (Shared)

Contact aligner(Shared)

Photo-mask writer (Shared)

Asher (Shared)

Local exhaust ventilation (Shared)

Scanning electron microscope (Shared)

High magnetic field annealing system

Stylus profiler

Wafer scriber

Wire bonding instrument (Shared)

Equipment for sample characterization

Vibrating sample magnetometer

X-ray diffraction machine (Shared)

Physical properties measurement system

Atomic-force/Magnetic-force microscope

Kerr-effect microscope

Kerr loop measurement system

Fully-automatic prober with perpendicular/in-plane magnetic field

Fully-automatic prober with arbitrary-direction magnetic field

Semi-automatic prober with perpendicular/in-plane magnetic field

Manual prober with perpendicular/in-plane magnetic field

Manual prober with perpendicular magnetic field

Manual prober with arbitrary-direction magnetic field

High-frequency prober with optical access

Refrigerator with rotating magnet

Current-in-plane tunneling system

Sheet-resistance measurement instrument