Fabrication tools
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- Ultrahigh vacuum sputtering system #1
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- Ultrahigh vacuum sputtering system #2
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- Reactive ion etching system
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- Ion beam etching system
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- Sputtering system
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- Atomic layer deposition system
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- Electron-beam lithography system (Shared)
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- Contact aligner（Shared)
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- Photo-mask writer (Shared)
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- Asher (Shared)
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- Local exhaust ventilation (Shared)
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- Scanning electron microscope (Shared)
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- High magnetic field annealing system
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- Stylus profiler
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- Wafer scriber
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- Wire bonding instrument (Shared)
Characterization tools
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- Vibrating sample magnetometer
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- X-ray diffraction machine (Shared)
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- Physical properties measurement system
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- Atomic-force/Magnetic-force microscope
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- Kerr-effect microscope
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- Kerr loop measurement system
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- Fully-automatic prober with perpendicular/in-plane magnetic field
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- Fully-automatic prober with arbitrary-direction magnetic field
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- Semi-automatic prober with perpendicular/in-plane magnetic field
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- Manual prober with perpendicular/in-plane magnetic field
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- Manual prober with perpendicular magnetic field
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- Manual prober with arbitrary-direction magnetic field
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- High-frequency prober with optical access
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- Refrigerator with rotating magnet
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- Current-in-plane tunneling system
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- Sheet-resistance measurement instrument
